Thin film getters

    Features and Applications

    This product is a thin film of titanium or zirconium alloy with optimized microstructure that can be activated over a wide temperature range. After activation, it can absorb impurity gases such as hydrogen, water vapor, carbon monoxide, carbon dioxide and other impurity gases other than inert gas in the vacuum environment, and improve and maintain the vacuum inside the device. It has the characteristics of large inspiration capacity, no particles, and low activation temperature. It can be widely used in various MEMS devices such as uncooled infrared sensors and Micro gyroscope. Different getter alloys are available for different encapsulation processes.

    Basic Characteristics and General Data

    The typical structure of the product is a stainless steel with a thickness of 50 microns as a carrier, and the surface is coated on both sides, with a film thickness of about 1.5 microns. The size shape can be customized according to user needs. It can also be deposited in the form of thin films on the surface of the wafer or various metal cover plates and ceramic shells.

    ●Sorption Capacity
    After the product is activated in a dynamic high vacuum of less than 1E-3Pa, it can have the ability to suction, and after cooling to room temperature, it still has the ability to adsorb various active gases. As the activation temperature increases, the inspiratory capacity gradually increases. The product is heated at the optimal activation temperature for 30min, and the adsorption capacity of CO after cooling is greater than 0.06Pa· L/cm2。 When the activation temperature exceeds the optimal activation temperature, the single inhalation performance after cooling is attenuated.
    When the product is activated by heating in a low vacuum, the active gases in the environment begin to be absorbed during the heating process. For different gases, its absorption speed and capacity are different. At a certain temperature and within the range of total absorption capacity, the initial absorption rate is faster, and then it will become slower and slower; When the temperature is raised again, the absorption rate is increased again and then attenuated again. After cooling, whether the product has residual suction capacity depends on the type of active gas it absorbs and the amount of inhalation.

    Suggested Activation Conditions

    For best performance, activation in a dynamic high vacuum of less than 1E-3Pa is recommended, and the recommended activation conditions for each film material are shown in the following list:

    Film Material









    The heating current-activation temperature curve provided in the Product Specification is tested by the product hanging in a vacuum, and the actual activation current vs. temperature depends mainly on the heat loss after the product is soldered inside the device. Due to the heat conduction of the welding position, the temperature of the welded part is much lower than the temperature of the middle part of the product.

    During activation, the getter will release internally solidly soluble hydrogen. If there is water in the environment, the oxygen in the water will be fixed by the getter, and the elemental hydrogen will be converted into hydrogen gas to be released. In a confined space, after cooling, whether this part of the hydrogen can be completely absorbed by the getter depends on the type and amount of gas it absorbs during activation.