PRODUCT

Non Evaporable Getter (NEG) Pumps


    Features and Applications

    NEG pump is a kind of chemisorption pump, which assembled after the NEG alloy heated by high sintering, It could eliminates large amounts of residual gases in a vacuum environment, mainly applied for UHV testing or Lab equipment. When it’s activated NEG pumps could operating without power, also free of Vibration and Nonmagnetic. The highlight of the NEG pumps it's extremely effective for Hydrogen and other active gases, and would never reduce under the UHV.

    Basic Characteristics and General Data

    Product Type

    length of Cartridge (mm)

    Getter Weight (g)

    Flange size

    Activation Power(W)

    Activation Temperature (℃)

    Reactivations (sorption cycles)

    NP-TMKZ-100

    62

    18

    CF35

    25

    450

    ≥100

    NP-TMKZ-200

    88

    35

    CF35

    45

    450

    ≥100

    NP-TMKZ-400

    135

    70

    CF35

    85

    450

    ≥100

    NP-TMKZ-1000

    142

    180

    CF63

    220

    450

    ≥100

    NP-TMKZ-1600

    145

    420

    CF100/CF150

    450

    450

    ≥100

    NP-TMKZ-2000

    195

    630

    CF100/CF150

    680

    450

    ≥100

    Product Type

     

    Pumping Speed(l/s)

     

     

    Sorption Capacity (Torr l)

    H2

    H2O

    N2

    CO

    H2

    H2O

    N2

    CO

    NP-TMKZ-100

    100

    75

    25

    45

    600

    5

    0.175

    0.35

    NP-TMKZ-200

    200

    145

    45

    90

    1160

    10

    0.35

    0.7

    NP-TMKZ-400

    400

    290

    95

    180

    1920

    20

    0.7

    1.4

    NP-TMKZ-1000

    800

    580

    185

    360

    5600

    50

    1.7

    3.5

    NP-TMKZ-1600

    1600

    1160

    370

    720

    11520

    120

    4

    8

    NP-TMKZ-2000

    2000

    1450

    450

    900

    17280

    180

    6

    12


    Suggested Activation Conditions

    It is recommended that the user use a constant current power supply to energize and activate the NEG Pump. Recommended activation conditions: Energizing activation at 450°C for 45min, the vacuum degree of the system in the whole process of activation should be better than 0.01Pa. Proper extension of the time will facilitate full activation of the NEG Pump. If the standard activation temperature cannot be reached, the activation time must be extended to compensate. It is necessary to ensure the vacuum degree of the vacuum chamber during the activation process, if the vacuum is too low, the following defects may occur: heater sputtering, suction material pollution, abnormal activation temperature and other adverse conditions. The NEG Pump releases a certain amount of gas during activation, in order to ensure the vacuum degree during the activation of the NEG Pump. We recommend that the NEG Pump should be activated under dynamic vacuum, and the activation process should be slowly and gradually increased from 1.5A until the predetermined current value is reached, the rapid deflation and the change of electrical parameters caused by the rapid change of the temperature of the NEG Pump must be avoided.

    Caution

    ●When activated and working, the NEG Pump casing and flange have a high temperature, pay attention to prevent burns.
    ●When the NEG Pump is at high temperature, it must be in vacuum conditions to avoid failures due to contamination and consumption.
    ●When connecting the power supply, ensure that the connection between the power supply and the flange electrode is firm, and pay attention to the insulation with other parts.
    ●Before heating activation, pay attention to ensure that the system is under vacuum conditions that meet the requirements.
    ●Under special circumstances, in order to make the NEG Pump have a high pumping speed for C, N, O and other gases, the working temperature can be maintained in the range of 200 °C ~ 250 °C (energized 2.5A), at which time the ultimate vacuum degree that the NEG Pump can achieve is reduced.
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