Thin film getters

Thin film getters is only a few nanometers' thickness getter coating on the Kovar alloy, ceramic, metal, monocrystaline wafer and so no. It¡¯s mainly used in uncooled infrared sensors, Micro gyroscope and lots of MEMS devices. It¡¯s had high absorbing capacity for all kinds of active gases, and could maintain and control the MEMS devices¡¯ vacuum without the risk of powder falls off. You could choose suited getter alloy for different packaging process.
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